Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review

The longstanding demands for micropressure detection in commercial and industrial applications have led to the rapid development of relevant sensors. As a type long-term favored device based on microelectromechanical system technology, piezoresistive sensor has become powerful measuring platform owing its simple operational principle, favorable sensitivity accuracy, mature fabrication, low cost. Structural engineering sensing diaphragm piezoresistor serves as core issue construction undertakes task promoting overall performance device. This paper focuses representative structural sensor, largely concerning trade-off between measurement nonlinearity. Functional elements top bottom layers are summarized, influences shapes arrangements piezoresistors also discussed. addition new materials endows research with possible solutions harsh environments. A prediction future tends is presented, including emerging advances science micromachining techniques that will help stronger participant upcoming epoch.